Equipment Performance list
PERFORMANCE & FUNCTION LIST

	Electron un	TEM point resolution	STEM probe size	Analyzer	Sample holder
Reaction Science high-voltage scanning transmission electron microscope JEM-1000K RS	Thermionic emission LaB₆	0.145nm	Equipped 1.0nm	EELS	Sibgle tilt, Double tilt, Heating (single tilt, double tilt, wire type), Cooling (Liq.N₂・Liq.He)、360° disc rotatin, 360° rod rotation, Nano indentation
Aberration corrected scanning transmission electron microscope EM-10000BU	Thermal field emission	0.11nm	Equipped <70pm	EDS、EELS	Sibgle tilt, Double tilt, Double tilt for EDS analysis
Ultra high resolution analytical scanning transmission alectron microscope JEM-ARM 200F-Cold	Cold field emission	0.19nm	Equipped <60pm	EDS、EELS	Sibgle tilt, Double tilt, Double tilt for EDS analysis
High resolution analytical scanning transmission alectron microscope JEM-2100F HK	Thermal field emission	0.23nm	Equipped 1.0nm	EDS	Sibgle tilt, Double tilt, Double tilt for EDS analysis
Scanning Electron Microscope JSM-6610A	Thermionic emission W	<50.0nm (SEM image)	No equipped	EDS	Standard, Cross-sectional
High-speed sample fabrication/analysis system MI4000L	Thermal field emission＋Gallium ion gun	1.1 nm (SEM image) 0.8 nm (STEM image) 4.0 nm (SIM image)	Equipped	EDS、EBSD	For SEM/FIB, For FIB, 45° tilting, For TEM mesh, Needle

（Current as of April, 2014）

Equipment Performance listPERFORMANCE & FUNCTION LIST